russell_gwilliam

Prof Russell Gwilliam

Email: r.gwilliam@surrey.ac.uk
Tel: +44 (0)1483 68 9845

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Prof Russell Gwilliam performs the ion beam implantation and supervises the fabrication of silicon electrical devices under Project 1.

Russell is the Professor of Semiconductor Process Engineering and Director of Technology for Surrey Ion Beam Centre, where he has built a portfolio of around 70 corporate users worldwide which have secured the commercial success of the Centre. He has >25 years experience in the development of advanced semiconductor processes in materials including Si, III-V’s, II-VI’s, SiC and diamond and he is also a founder and director of start up company Si-Light Technologies Ltd. He has published over 250 papers in the area of ion beam processing of materials and is a regular invited speaker at international conferences and the author of several patents. He represents the UK on international committees including those for Ion Implantation Technology and Ion Beam Modification of Materials.